EE 410/510 - Microfabrication & Semiconductor Processes

(Dr. John Williams, Fall 2008)

Part 1 - Course introduction

Part 2 - Materials, Definitions, Scaling Laws

Part 3 - Photolithography

Part 4 - Wet Etching

Part 5 - Dry Etching

Part 6 - Thin Film Deposition

Part 7 - Molecular Beam Epitaxy

Part 8 - Semiconductor Diffusion

Part 9 - Ion Implantation

Part 10 - LIGA

Part 12 - MEMS Packaging